Faster chip performances in ever shrinking electronic devices push circuits down to nanometer size. Spintronic devices and optical properties of organic semiconductors depend on their nm level local structure . Orientation and phase mapping with ASTAR sheds light to local texture and phases, while 3D electron diffraction tomography reveals detailed crystal structure of possible impurities. As metrology tool detailed strain maps down to nm scale allow to monitor precisely electrical properties and avoid device failure.



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