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ASTAR SEMICONDUCTORS LITERATURE
Ganesh, K.J.,, et al. "Automated Local Texture and Stress Analysis in Cu Interconnects Using D- STEM and Precession Microscopy." Microscopy and Microanalysis, vol. 16,no.2, 2010, doi: 10.1017/S1431927610061933
Häusler, I.,, et al. "Crystallite Phase and Orientation Mapping of MnAs in GaAs on the Basis of Automatically Analyzed Precession Electron Diffraction Spot Patterns." Proc. IMC17, pp. 2–3, 2010, doi: 10.1109/NANO.2011.6144300
Ganesh, K.J.,, et al. "D-STEM: A Parallel Electron Diffraction Technique Applied to Nanomaterials." Microscopy and Microanalysis, vol. 16, no. 5, pp. 614–21, 2010, doi: 10.1017/S1431927610000334
Brandstetter, S.,, et al. "Pattern Size Dependence of Grain Growth in Cu Interconnects." Scripta Materialia, vol. 63, no. 10, pp. 965–68, 2010, doi: 10.1016/j.scriptamat.2010.07.017
S Brandstetter, et al. "Pattern size dependence of grain growth in Cu interconnects", 2010, doi: https://www.sciencedirect.com/science/article/pii/S1359646210004902
Clement, L.,, et al. "Microscopy Needs for next Generation Devices Characterization in the Semiconductor Industry." Journal of Physics: Conference Series, vol. 326, no. 1, 2011, doi: 10.1088/1742-6596/326/1/012008
Ganesh, K.J.,, et al. "Rapid and Automated Grain Orientation and Grain Boundary Analysis in Nanoscale Copper Interconnects." International Reliability Physics Symposium, vol. 5, no. C, p. 3, 2011, doi: 10.1109/IRPS.2011.5784524
Cao, L.,, et al. "Analysis of Grain Structure by Precession Electron Diffraction and Effects on Electromigration Reliability of Cu Interconnects." IEEE International Interconnect Technology Conference, IITC pp. 12–14, 2012, doi: 10.1109/IITC.2012.6251667
Estradé, S.,, et al. "Assessment of Misorientation in Metallic and Semiconducting Nanowires Using Precession Electron Diffraction." Micron, vol. 43, no. 8, Elsevier Ltd,pp.910–15, 2012, doi: 10.1016/j.micron.2012.03.003
Yoo, S. J.,, et al. "Characterization of Crystallographic Properties of GaN Thin Film Using Automated Crystal Orientation Mapping with TEM." Metals and Materials International, vol. 18, no. 6, Dec. pp. 997–1001, 2012, doi: 10.1007/s12540-012-6011-6
Häusler, I.,, et al. "Crystallite Phase and Orientation Determinations of ( Mn , Ga ) As / GaAs- Crystallites Using Analyzed ( Precession ) Electron Diffraction Patterns.", 2012, doi:
Ganesh, K.J.,, et al. "Effect of Downscaling Nano-Copper Interconnects on the Microstructure Revealed by High Resolution TEM-Orientation-Mapping." IEEE International Interconnect Technology Conference, vol. 18, IEEE, pp. 1–3, 2012, doi: 10.1109/IITC.2012.6251667.
CK Hu, et al. "Scaling and Microstructure Effects on Electromigration Reliability for Cu Interconnects", 2012, doi: https://books.google.com/books?hl=en&lr=&id=Njx9PFHdxjQC&oi=fnd&pg=PA291&ots=CN6LV-GBTZ&sig=HKnH1oyOjeQuptFenQF_JeOIgh4
Cao, L.,, et al. "Grain Structure Analysis and Effect on Electromigration Reliability in Nanoscale Cu Interconnects." Applied Physics Letters, vol. 102, no. 13, pp. 1–5, 2013, doi: 10.1063/1.4799484
Darbal, A. D.,, et al. "Grain Boundary Character Distribution of Nanocrystalline Cu Thin Films Using Stereological Analysis of Transmission Electron Microscope Orientation Maps." Microscopy and Microanalysis, vol. 19, no. 1, pp. 111–19, 2013, doi: 10.1017/S1431927612014055
Cao, L.,, et al. "Grain Structure Analysis and Effect on Electromigration Reliability in Nanoscale Cu Interconnects." Applied Physics Letters, vol. 102, no. 13, 2013, doi: 10.1063/1.4799484
Martinez, M.,, et al. "Mechanisms of Copper Direct Bonding Observed by In-Situ and Quantitative Transmission Electron Microscopy." Thin Solid Films, vol. 530, Elsevier B.V., pp. 96–99, 2013, doi: 10.1016/j.tsf.2012.02.056
Galand, R.,, et al. "Microstructural Void Environment Characterization by Electron Imaging in 45 Nm Technology Node to Link Electromigration and Copper Microstructure." Microelectronic Engineering, vol. 106, Elsevier B.V., pp. 168–71, 2013, doi: 10.1016/j.mee.2013.01.018
L Cao - 2014 - repositories.lib.utexas.edu, et al. "Effects of scaling on microstructure evolution of Cu nanolines and impact on electromigration reliability", 2014, doi: DOI:10.1063/1.4799484
Haas, B.,, et al. "Microstructural Characterization of Organic Heterostructures by (Transmission) Electron Microscopy." Crystal Growth and Design, vol. 14, no. 6, pp.3010–14, 2014, doi: 10.1021/cg5002896
Ruiz-Zepeda, F.,, et al. "Precession Electron Diffraction-Assisted Crystal Phase Mapping of Metastable c-GaN Films Grown on (001) GaAs." Microscopy Research and Technique, vol. 77, no. 12, pp. 980–85, 2014, doi: 10.1002/jemt.22424
Barmak, K.,, et al. "Surface and Grain Boundary Scattering in Nanometric Cu Thin Films: A Quantitative Analysis Including Twin Boundaries." Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, vol. 32, no. 6, p. 061503, 2014, doi: 10.1116/1.4894453
Zhang, X.,, et al. "Co Liner Impact on Microstructure of Cu Interconnects." ECS Journal of Solid State Science and Technology, vol. 4, no. 1, pp. N3177–79, 2015, doi: 10.1149/2.0141501jss
Valery, A.,, et al. "Dealing With Multiple Grains in TEM Lamellae Thickness for Microstructure Analysis Using Scanning Precession Electron Diffraction." Microscopy and Microanalysis, vol. 21, no. S3, pp. 1243–44, 2015, doi: 10.1017/s143192761500700x
Hrkac, V.,, et al. "Structural Study of Growth, Orientation and Defects Characteristics in the Functional Microelectromechanical System Material Aluminium Nitride." Journal of Applied Physics, vol. 117, no. 1, 2015, doi: 10.1063/1.4905109
T.Dankwort, et al. "Martensite Adaption through Epitaxial Nano Transition Layers in TiNiCu Shape Memory Alloys" J. Appl. Cryst. .49, 2016, doi: 10.1107/S160057671600710X
A.Valery, et al. "ACOM-TEM: potentiel et limites de caractérisation de la microstructure des matériaux de la microélectronique PhD", 2017, doi:
A Valery - 2017 - theses.fr, et al. "Caractérisation de microtextures par la technique ACOM-TEM dans le cadre du développement des technologies avancées en microélectronique", 2017, doi: https://www.theses.fr/2017GREAI018
A Kobler, et al. "Challenges in quantitative crystallographic characterization of 3D thin films by ACOM-TEM", 2017, doi: https://www.sciencedirect.com/science/article/pii/S030439911630095X
R Ruffilli - 2017 - tel.archives-ouvertes.fr, et al. "Fatigue mechanisms in Al-based metallizations in power MOSFETs", 2017, doi: https://tel.archives-ouvertes.fr/tel-01933501/
I Häusler, et al. "Orientation relationships of Mn0.75Ga0.25As crystallites on and within GaAs determined by scanning nano beam electron diffraction", 2017, doi: https://onlinelibrary.wiley.com/doi/abs/10.1002/crat.201600261
Lee, S. Y.,, et al. "Transmission Orientation Imaging of Copper Thin Films on Polyimide Substrates Intended for Flexible Electronics." Scripta Materialia, vol. 138, Acta Materialia Inc., pp. 52–56, 2017, doi: 10.1016/j.scriptamat.2017.05.037
L Latu-Romain, et al. "About the control of semiconducting properties of chromia: investigation using photoelectrochemistry and orientation mapping in a TEM", 2018, doi: https://doi.org/10.1080/09603409.2017.1389113
R Ruffilli, et al. "Aluminum metallization and wire bonding aging in power MOSFET modules", 2018, doi: https://doi.org/10.1016/j.matpr.2018.03.056
M Agati, et al. "Chemical phase segregation during the crystallization of Ge-rich GeSbTe alloys", 2019, doi: https://pubs.rsc.org/en/content/articlehtml/2019/tc/c9tc02302j
Loïc Henry, et al. "Studying phase change memory devices by coupling scanning precession electron diffraction and energy dispersive X-ray analysis", Acta Materialia 201 72-78, 2020, doi: 10.1016/j.actamat.2020.09.033